First series
High Frequency Probe Station
- Standard Wafer Chuck Diameter： 150 mm
- Chuck Stage Travel Range： 155 mm×155 mm
- DUT Size Supported： Wafers 25 mm to 150 mm or Shards
- Vacuum Ring Diameter： 22 mm, 42 mm, 66 mm, 88 mm, 110 mm
- Surface Planarity： <±3 μm
- Chuck Stage Resolution： 5 μm
- Z Height Adjustment Range： 10 mm
- Chuck Stage Theta Travel Range： 0~360°
- INQUIRY
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High Frequency Probe Station.pdf
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Henan Opte Sensors Co.,Ltd
Tel: +86 18137855795
E-mail: info@opte.com.cn
Add: 28th floor, Dongfang Building, Erqi District, Zhengzhou City, Henan Province